SIMS Depth Profiling: Things your Mother Never Told You

Confidence in a depth profile result requires that several factors be taken into account. The parameters chosen for analysis must be within the limitations of the instrument and reflect an understanding of the sample. The analysis area available will determine the latitude of raster and gate dimensions and will impact the depth resolution and sensitivity that can be obtained. A mass interference can cause an erroneous conclusion. The species chosen for analysis, the matrix, and the detection electronics play a role in count rate saturation. Profiling a matirx species can identify an unexpected variation or layer in the sample or indicate a change in primary current. Memory effect due to the prior analysis of other materials will degrade the detection limit that can be obtained. Comments will be made on the difference between quadrupole and magnetic sector analyzers for these parameters.