Thin-film circuits - a review
01 January 1966
Thin-films is a term which covers circuits and components formed by depositing layers of the order of 1 micron in thickness. It is possible to produce passive and active circuit components by this method, although thin film transistors are as yet still in a development stage. The application, cost and reliability of thin films are reviewed, and three tables are included comparing resistor, capacitor, and circuit properties with thick films, semiconductor circuits, and various film techniques.