Ultrapurification of nitrogen monitored by metastable transfer emission spectroscopy.

01 January 1986

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Metastable energy transfer emission spectroscopy, a highly sensitive, convenient, and low cost technique, has been applied for online monitoring of nitrogen purity. Total oxygen impurity levels are detected sensitively by NO emission and carbon levels by emission from CN specie formed by chemiluminescent reactions of O and C specie with metastable excited state nitrogen.