Integrated Four-Channel Mach-Zehnder Multi/Demultiplexer Fabricated With Phosphorous Doped SiO sub 2 Waveguides on Si.

An analysis and the device performance of an integrated optical 4 channel multi/demultiplexer based on Mach-Zehnder interferometer elements are presented. The channel spacing is 77angstrom. Single mode channel waveguides are made from P-doped SiO sub 2 core layers. Waveguide losses as low as 0.05 dB/cm and fiber- to-waveguide but coupling as low as 0.5 dB for lambda = 1. 5micron have been obtained. The multiplexer transfers power from 4 input channels into a common output channel with an average fiber-to-fiber loss of 2.6 dB per channel. The average cross talk of the demultiplexer is -16 B.