Integrated RM MEMS for Single Chip Radio
14 June 2001
The persistent drawbacks encountered in RF systems essentially reside in the bulk passive components. Integration solutions to obtain single-chip radio are therefore greatly investigated to improve compactness, performances and also cost. Three different and main integrated passive components are presented in this paper. An acoustic-wave micromachined resonator based filter is developed, which has potential for integration with RF front-end circuits, unlike surface acoustic-wave (SAW) or ceramic filters. Self-assembled RF inductors follow, which offer an attractive alternative to traditional ones with limited quality factor and resonant frequency. And finally, a micro-electro-mechanical (MEM) switch with high isolation level and low insertion loss is described.