Internal bandwidth equalization in a CMOS compatible Si-ring modulator

Bandwidth equalization using a simple CMOS-compatible tunable silicon-ring modulator is shown. We demonstrate a 37 GHz small signal bandwidth and use the resonator to mitigate bandwidth limitations from other measurement system components. Configuring the optical carrier to be off resonance within the ring free spectral range allows high frequency enhancement and low frequency suppression of the S21 parameter to achieve system response equalization. Our results suggest that the carrier and modulation sidebands can have very different transient characteristics within the ring modulator.