Micromachined RF passive components and their applications in MMICs
01 July 1999
The design, fabrication, and characterization of micromachined RF passive components, including spiral inductors, Q- and L-enhanced inductors, and MIM capacitors, monolithically realized on suspended membranes in an f(T) = 15 GHz silicon bipolar process (DIMES-03) are described. The performance of active inductors, active resonators, and oscillators incorporating suspended-membrane components is compared to that of conventional MMIC circuit realization. (C) 1999 John Wiley & Sons, Inc.