Nanoporous Ultra Low-Dielectric Constant Organosilicates Templated by Triblock Copolymers

Triblock polymers, poly(ethylene oxide-b-propylene oxide-b-ethylene oxide) (PEO-b-PPO-b-PEO), are used as molecular templates in poly(methyl silsequioxane) (MSQ) matrices to fabricate nanoporous organosilicates for low dielectric constant applications. The results show that aggregation of block copolymers in the MSQ matrix can be prevented with the fast solvent evaporation, which accompanies spin casting.