Near-Field Microwave Microscopy of Thin Film Resonators

We present phase-sensitive, high spatial resolution, near-field microwave microscopy images of the rf fields radiated by piezoelectric resonators operating in the vicinity of 2GHz. Near the resonance our data show a complex distribution of fields. We fit our data to the Butterworth/Van-Dyke model that describes the behavior of these devices, and find very good qualitative agreement. In general, we show the potential of this phase-sensitive near- field imaging technique to study the behavior of complex rf devices, with potential impact on the optimization of the device's design.