Non-overlapping Super Self-Aligned BiCMOS with 87ps Low Power ECL.

BiCMOS technology which merges optimal CMOS and bipolar device structure is reported in this paper. Based on a Non- OVerlapping super self-Aligned structure (NOVA), the latest 1.5micron CMOS and ECL ring oscillators have delays of 128ps/stage and 87ps/stage respectively. Frequency divider operating up to 4.1GHz has been fabricated. Multiplexer and demultiplexer have been tested up to 5.5Gb/s and 6.2Gb/s respectively. In addition to self- alignment, a unique epi/isolation scheme combining lateral autodoping free epi deposition with a new fully recessed oxide process have been developed. This approach significantly simplifies the isolation process and is an important factor in achieving high speed with a conservative 1.5micron design rule.