Nonadiabatic Excitations in Hyperthermal Gas-Surface Scattering

30 October 1986

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Nonadiabatic excitation processes have been directly measured in the scattering of 2-15 eV rare gas atoms from single crystal semiconductor surfaces. These include: electron-hole pair excitation, ejection of ionic substrate and adsorbate atoms (neutrals are also observed), and incident particle ionization.