Nondestructive measurement of layer thicknesses in double heterostructures by X-ray diffraction.

Double crystal rocking curves for an InP/InGaAsP/InP double heterostructure grown by hydride vapor phase epitaxy have been obtained which reveal fringes corresponding to both the top InP layer and to the buried InGaAsP layer thickness. Fourier transform spectra of the rocking curves are shown to be very useful in extracting the thicknesses.