Optical diagnostic studies of trimethyl phosphine containing radio frequency discharges.

We have investigated the decomposition of P(CH sub 3)sub 3 in 13 MHz, radio frequency discharges of He and H sub 2. Atomic phosphorus relative levels are estimated from plasma- induced P-emission intensities, relative to Ar, while quantitative, relative P sub 2 number densities are measured by ArF excimer laser induced fluorescence. Generation of P and P sub 2 in He and H sub 2 discharges is mainly controlled by enhanced electron energy relaxation due to addition of P(CH sub 3) sub 3. Under optimum conditions, plasma decomposition of P(CH sub 3) sub 3 (and by analogy PH sub 3) promises to be an attractive alternative to inefficient pyrolysis as a source of phosphorus for growth of epitaxial InP and other phosphorus-containing thin films.