Organometallic Vapor Phase Epitaxial Growth of ZnS Using a New Sulfur Source

The need for development of improved growth processes and enhanced laboratory safety during organometallic vapor phase epitaxial (OMVPE) growth of semiconductors has resulted in extensive effort in the search for alternative group V and VIOM source compounds, especially for arsenic and tellurium. While other elements such as selenium and phosphorus have also been studied, there has been little work on alternative OM sources of sulfur for the growth of ZnS, for example.