Quantitative analysis of electronic grade nitrogen and argon for oxygen impurities by metastable transfer emission spectroscopy.

The viability of metastable transfer emission spectroscopy (MTES) as a practical quantitative trace analysis tool is examined via a detailed investigation of its application for the quantitative determination of oxygen containing impurities in electronic grade nitrogen and argon. Intensity responses for NO(B(2)pi -> X(2) pi) derived from chemiluminescent reactions of active nitrogen with O2, H2O, CO2, CO, and SO2 are calibrated using serial dilution techniques providing coverage over the concentration range 2 to 3000 ppm.