Quantitative microanalysis using ELS.

This tutorial chapter discusses the techniques of spectrum processing and data manipulation required to obtain quantitative microanalytical data from transmission electron energy loss spectra. Worked examples of quantitation are provided using a parameterized method suitable from "off-line" calculations. Instrumental, experimental, and theoretical limits to accuracy are considered. This chapter, with its companion "Principles of electron energy loss spectroscopy," will appear in "Principles of Analytical Electron Microscopy," to be published by Plenum Press, New York.