Reaction of NF sub 3 and SF sub 6 with some oxides connected with heavy metal fluoride glass processing.

01 January 1988

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The fluorinating properties of NF sub 3 and SF sub 6 in heavy metal fluoride glass processing were investigated between 200 and 1100C. Using IR ions of NF sub 3 with ZrO sub 2 and Al sub 2 O 3 and the reactions of SF sub 6 with Zr O sub 2, SiO sub 2, and Ni were studied. The reaction of NF sub 3 with zirconia and alumina starts at 300 and 650C, respectively, (yielding nitrogen oxides, nitrogen oxyfluoride, and presumably the metal fluorides). The reaction of SF sub 6 and zirconia starts at 600C, yielding SO sub 2 F sub 2. SF sub 6 and silica yield (above 900C) SiF sub 4, SO sub 2 F sub 2, and SOF sub 2.