Reflectance, Transmittance and Loss Spectra of Multilayer Si/SiO sub 2 Thin Film Mirrors and Antireflection Coatings for 1.5microns.
01 January 1990
A method is described to measure transmittance, reflectance, and loss spectra in thin optical films. The method is applied to measure the properties of multilayer coatings of Si and SiO sub 2 used to make mirrors and anti-reflection coatings in the 1.0-1.7microns wavelength region. Mirror reflectance up to 99.5% with 9 quarter-wavelength layers, and 2 layer antireflection coatings with reflectance less than 0.2% have been made.