RF MEMS for Ubiquitous Wireless Connectivity: The Time is Now-Part I/Part II

Presented in two parts, this article is organized as follows. Part I, "Fundamentals of RF MEMS Technbology," focuses on fabrication (surface and bulk micromachining) techniques and their limitations, comparing key physical actuation mechanisms upon which RF MEMS devices may be predicated, and device-level packaging. Part II, to appear in the next issue of "Microwave Magazine", focuses on the progress and impact of RF MEMS devices on wireless systems, in particular, on handsets, base stations, and space applications.