Safety Recommendations for Liquid and Gas Bulk Hydrogen Systems
01 January 1990
The Semiconductor Industry utilizes hydrogen from liquid or gas bulk supply sources at many of its facilities. High purity hydrogen is used in large quantities for a variety of semiconductor applications. The safe storage and distribution of hydrogen from a bulk supply system is a responsibility that must be shared by the hydrogen vendor and the user. Many recent changes in National Building and Fire Codes have required the semiconductor industry to include additional safety devices and controls on these systems.