Structure of Highly Perfect Semiconductor Stained-Layer Superlattices: High-Resolution X-Ray Diffraction and Computer Similation Studies

High-resolution x-ray diffraction (HRXRD) measurements of strained-layer superlattices have been carried out using a four-crystal monochromator. A wide asymmetric range of extremely sharp higher order x-ray satellite peaks is observed indicating well-defined strained-layer superlattices with abrupt interfaces. Using a kinematical diffraction step model which assumes ideally sharp interfaces, structural parameters such as the thickness, strain, and composition of the well can be extracted. Excellent agreement between measured and simulated x-ray satellite patterns is achieved. These results show that HRXRD together with the kinematical step model provides a powerful tool to evaluate the structural perfection of strained-layer superlattices.[1,2,3]