Structure of Highly Perfect Semiconductor Strained-Layer Superlattices: High-Resolution X-ray Diffraction and Computer Simulation Studies.

High-resolution x-ray diffraction (HRXRD) measurements of strained- layer superlattices (SLS's) have been carried out using a four- crystal monochromator. A wide asymmetric range of sharp higher- order x-ray satellite peaks is observed indicating well-defined periodic structures. Using a kinematical diffraction step model, very good agreement between measured and simulated x- ray satellite patterns could be achieved. These results show that this x-ray method is a powerful tool to evaluate the crystal quality of SLS's.