Superconducting Y-Ba-Cu-O Oxide films by sputtering.

We have prepared superconducting thin films of Y-Ba-Cu-O with T sub c onset above 95k by both diode and magnetron sputtering. The compositions of the films are fairly uniform across an area 50mm in diameter and through the film thickness. Structural properties of the films were studied by X-ray diffraction. Critical current densities over 3000 A/cm sup 2 have been measured at 4.2K.