Synthesis and Polymerization of Trimethylgermylmethyl Methacrylate: A New Class of Organogermanium Polymers.
01 January 1989
In this work we describe the synthesis of trimethylgermylmethyl methacrylate (GEM) from germanium tetrachloride, and also the first reported syntheses of polymers containing the GEM functionality. Both the homopolymer and a copolymer with chloromethystyrene were prepared by free radical solution polymerization, and their properties characterized. These materials hold potential as resists for microlithography, in analogy with the existing silicon and tin containing homologs. Their preparation enables the comparison of organometallic polymer systems differing sole at the metal atom center -Si, Ge, or Sn. Initial oxygen reactive ion etching homologous organosilicon polymer.