Synthesis of strained-layer superlattices by metalorganic chemical vapor deposition.

Superlattice structures composed of multiple thin layers of two different semiconductors having different lattice constants can have electronic properties that are unlike the properties of the semiconductors that compose the individual layers. Such a superlattice structure made up of lattice-mismatched materials is called a strained-layer superlattice (SLS). Recently, metalorganic chemical vapor deposition (MOCVD) has been used to grow a variety of such SLS materials composed of different compound semiconductors.