Techniques for fabrication of Bragg reflectors on SiO sub 2 - Si sub 3 N sub 4 - SiO sub 2 rib waveguides on Si.

Bragg reflector fabrication techniques on SiO sub 2 - Si sub 3 N sub 4 - SiO sub 2 rib waveguides on Si are developed and optimized. Phase drift due to the effect of air density fluctuation during the holographic exposure of amplitude division interference type was studied and removed. These improvements enabled high quality Bragg reflectors over 2" in diameter to be reproducibly fabricated.