Techniques for Realizing Linearly Graded Composition of Doping Profiles in Molecular-Beam Epitaxy
01 January 1987
Molecular beam epitaxy has inspired many novel device structures that require a linear variation of doping density or alloy composition as a function of depth. Linear grading of alloy composition is more complex than it first appears because of the effect of changing flux on the growth rate as well as the nonlinear dependence of molecular flux on the effusion cell temperature.