The basic principles of EELS.
01 January 1986
Electron Energy Loss Spectroscopy performed in a transmission electron microscope permits chemical microanalysis to be performed with high spatial resolution. This chapter, to be published in "Principle of Analytical Electron Microscopy" (Plenum Press: New York), outlines the physics of inelastic electron scattering, the instrumental aspects of collecting the spectra, and discusses practical details of applying the technique for microanalysis.