The Effect of Annealing on the Structure of Epitaxial CaF sub 2 Films on Si(100).
01 January 1989
We have studied the effect of different annealing conditions on the crystallinity and morphology of 100angstroms epitaxial CaF sub 2 films on Si(100). The crystallinity of the films is improved by the anneals, with the highest anneal temperatures giving the greatest improvement. The results are consistent with the model previously proposed to explain the success of rapid thermal annealing in improving thicker epitaxial CaF sub 2 films.