The effect of PH(3) pyrolysis on the morphology and growth rate of lnP grown by hydride vapor phase epitaxy.

The incomplete pyrolysis of PH(3) is shown to have a significant effect on the growth rate and morphology of lnP grown by hydride vapor phase epitaxy. Using ultraviolet absorption spectroscopy to determine the extent of PH(3) pyrolysis, the growth rate of lnP is shown to increase with decreasing PH(3) pyrolysis. Incomplete PH(3) pyrolysis is also shown to dramatically increase the formation of growth hillocks on 100> lnP epitaxial layers. The use of various metal catalysts to expedite PH(3) pyrolysis to eliminate hillock formation during lnP growth is described, and a qualitative model of PH(3) induced hillock growth is presented.