The Next Generation of Materials and Processing for Electronic and Opto-Electronic Technologies; Role of Computation
24 March 1987
The role of computer modelling and simulation in electronic device technology is well illustrated by the subject of ion implantation. Numerous programs now exist that calculate the range and straggling of the implanted species. The initial computations came from the radiation damage community. Indeed the Monte Carlo computations of Robinson and Oen in the early 1960's of the trajectories of atoms in solids predicted the existence of channeling. This work is a beautiful example of computer modelling leading to the discovery of a subject of considerable importance.