The Proximity Parameter Package (3P): A Set of Computer Programs that Theoretically Determine the Functions Necessary for Proximity Correction in Electron Beam Lithography.
22 September 1989
The Proximity Parameter Package (3P) is a set of computer programs that determine the energy distribution in a resist (after electron beam exposure), the proximity function and the parameters for the double Gaussian approximation to the proximity function. This information can then be supplied directly to a data preparation and correction program that will proximity correct chip patterns written with electron beam lithography. The advantages of the theoretical determination of the proximity parameters include off line processing, "what if" analysis, quick turn around and ease of use.