The purity of Tungsten Hexafluoride Determined by Fourier Transform Mass Spectrometry

Four commercial samples of tungsten hexafluoride were analyzed for purity by Fourier transform mass spectrometry. Impurities were identified by accurately measuring the masses of the ions observed. Quantitation was based on ion intensities, which were corrected for ionization cross sections of the molecule, fragment ion abundance, and diffusion rate into the mass spectrometer.