The radiation chemistry of polymers for electronic applications.

Polymer chemistry and polymer radiation chemistry in particular are key elements of the electronics industry. Polymer materials that undergo radiation induced changes in solubility are used to define the individual elements of integrated circuits. As the demands place on these materials increases due to increased circuit density and complexity, new materials and chemistry will be required. Many of the new chemistries that are being developed are described in this article. This will be an overview chapter for an ACS Symposium Series Volume based on the U. S. - Australia Workshop on "Radiation Effects on Polymeric Materials."