The use of chemical scrubbers for the removal of AsH3 and PH3 from VPE reactor effluent
06 November 1986
The treatment of Vapor Phase Epitaxial (VPE) reactor effluent containing AsH3 and PH3 using various types of wet and dry chemical scrubbers is described. Wet chemical scrubbers tested include simple bubblers and Venturi scrubbers using alkaline NaOCl and KMnO4. The dry chemical scrubbers tested both employ an absorbent media impregnated with an oxidizing agent