Three-dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing

This letter describes the use of a contact printing technique, known as nanotransfer printing (nTP), for forming three-dimensional (3D) structures with feature sizes between tens of nanometers and tens of microns over areas of several square millimeters. We demonstrate the individual and combined use of three different approaches - deep etching through printed hard masks, direct transfer of three-dimensional structures, and purely additive fabrication of multilayer stacks - for using nTP to fabricate a range of complex 3D nanostructures, including closed channels, suspended beams and lattices, that would be difficult or impossible to build with other methods.