Wideband Mixed Lumped-Distributed-Element 90° and 180° Power Splitters on Silicon Substrate for Millimeter-Wave Applications
17 June 2007
This paper presents two millimeter-wave lumped distributed 90° and 180° power splitters fabricated in the backend-of-the- line (BEOL) of a 0.18 ?m SiGe BiCMOS technology. The 180° and 90° power splitters based on mixed lumped-distributed- element three-port Wilkinson power divider with phase shifters at the outputs are shown to achieve an amplitude balance of better than 0.05 dB and 0.21 dB, respectively, at 77 GHz.
