A method for optimizing the electron optics of the SCALPEL exposure tool is described. The method uses the SCALPEL mark detection method with a grating mark as an aerial image monitor.
All appropriate organizational approvals for the publication of this paper have been obtained.
According to the Mars Express mission , the MARSIS primary scientific objectives are to map the distribution of water, both liquid and solid, in the upper portions of the crust of Mars.
MARS is an exploratory project within Lab 1138. It is a hardware accelerator capable of efficiently implementing a wide range of event driven simulation algorithms.
An approach to the inversion of the data available from the MARSIS (Mars Advanced Radar for Subsurface and Ionosphere Sounding) instrument on Mars Express is described.
In this paper, we report polarized optical microscopy and electrical transport studies of manganese oxides that reveal that the charge ordering transition in these compounds exhibits typical signat
In an active satellite communication system, the ultimate in ground station receiver performance is highly desirable, if not absolutely necessary.
The electron-beam projection lithography technique known as scattering with angular limitation projection electron-beam lithography (SCALPEL) is capable of producing linewidths of 100 nm and smalle
Non-ideal feature profile anomalies such as undercut, tapered, or bowed sidewalls and microtrenches at the base of the sidewall are often observed after etching SiO sub 2-masked silicon (Si) in chl
In this paper, we studied the effect of temperature and mask margin size on optical emission and growth rate enhancement (GRE) of InGaN grown by metal organic chemical vapor deposition (MOCVD) and
