This paper presents guidelines for the deep reactive ion etching (DRIE) of silicon MEMS structures, employing SF6/O-2-based high-density plasmas at cryogenic temperatures.
This chapter discusses an advanced topic of interest to those who have worked in standardization, have written Diameter implementations, or who have used Diameter to solve specific business problem
A variety of parameters is currently used to report resist properties in the technical literature.
The concept of generic qualification of a microcircuit manufacturing technology for military procurements has introduced several innovative requirements.
Nonplanar conjugated systems which contain formally sp(2) hybridized carbon atoms have assumed an ever increasing presence in organic chemistry.
This paper discusses different implementation options of telecommunication network GW functions like the 3GPP Evolved Packet Core (EPC) S/PGW in Cloud computing environments.
It has been shown that, for certain ranges of transverse magnetic field, there are an infinite number of propagating modes in a waveguide completely filled with ferrite, 1 2 3 no matter how small t
In this paper we analyze the stability of a gyroscopic oscillator interacting with a finite- and infinite-dimensional heat bath in both the classical and quantum cases.
For global navigation satellite systems (GNSS), performance in harsh environments such as urban canyons and indoors can be improved by leveraging cellular localization systems.
This paper presents a general approach for controller design for systems with large flexible appendages.