Wireless systems requirements for increased data capacity and decreased size and power consumption have pushed radio frequency integrated circuit (RFIC) technology to extremes.
In this article we describe the basic principles and advantages and limitations of MEMS technology and present examples of experiments in which micromachines are used to do physical measurements th
A cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference.
A cantilever-based uncooled IR imager was developed utilizing a novel optical readout scheme based on inter-pixel interference.
A cantilever-based uncooled IR previous termimagernext term was developed utilizing a novel optical readout scheme based on inter-pixel interference. A series of small arrays (approximately 100 ?
We present an analytic optical performance evaluation of tip/tilt and piston Spatial Light Modulator, for adaptive optic and beam steering applications.
A fully packages variable optical attenuaror based on a MEMS silicon chip is shown to have low insertion loss, low PDL, a flat response over 1530nm-1565nm, and a low DC drive voltage.
A 64-channel 14 GHz-spaced MEMS-based filter has been constructed.
This paper presents the implementation and test of prototype RF MEMS based voltage controlled oscillators (VCO) for space applications.
A layered structure including a variable air gap or gaps is appropriately thought of as a dielectric stack whose optical properties can be driven.
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