Publications

We use a two-photon laser-scanning microscope to fabricate two-dimensional (2D) photonic crystal structures in commercially available SU-8 polymer films, and successfully demonstrate making nanostr

This memorandum describes the in-place fabrication of linear and rotary polysilicon micromechanical structures, using surface micromachining techniques.

In this work, colloidal suspensions are used as a precursor to the formation of layers of optical quality glass on silicon substrates.

A number of the fiber fabrication methods have evolved in response to the interest in active fiber devices based on rare earth doped core silicate fiber.

We have developed a fabrication procedure for reduced area InP/InGaAs based HBT and DHBT devices using a process involving both wet chemical and ICP plasma etching.

We have developed a robust fabrication procedure for reduced area InP based HBT's, using a process involving both wet etching and ECR plasma etching.

The focusing of subnanometer wavelength x rays is limited by the ability to fabricate high-quality optics.

For the last four decades, the feature sizes of electronic devices for computers have been reduced by a factor of two roughly every 18 months.

The trend toward surface mount technology (SMT) has increasingly stressed many areas in circuit-pack manufacturing, such as CAD tools, printed wiring board (PWB) manufacturing, electrical tests, an

A so-called SiDeox new technology to fabricate a thick silicon oxide layer with an underneath cavity for applications in RF MEMS devices is presented.